Silicon Carbide 6H Substrates

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Prime Grade
Diameter:100.0+0 / - 0.5mm
Edge Exclusion:4mm
Center Thickness:500+/- 25um
Polytype: 6H, > 95% of area
Micropipe Density: < 30cm-2
Face Orientation: C-plane (0001); on-axis 0.5deg
Front Surface (Si-face) Finish: EpiReady
Scratches by Bright Light
Cumulative Length < 10 cm
Back Surface (C-face) Finish: Optical Polish (standard)
Warp: < 40um
Bow: < 25um
TTV:< 15um
Flat Length: Primary 32.5±2mm
Flat Length: Secondary 18.0±2mm
Flat Orientation: Primary Perpendicular to (11-20) plane 1 deg
Flat Orientation: Secondary 90° CW from primary flat 5 deg
Laser Mark: Carbon Face
Location & Text: Per SEMI M55
Edge: Rounded, conforming to SEMI edge acceptability specs
Packaging: Single wafer container or Multi-Wafer Cassette
Cracks: None
Cumulative Area Defects: < 10% Area
Dopant: SI Vanadium Doped ( > 1.0E5) Ohm*cm

6H SiC Wafer Inventory

Below is just a small list of our inventory. Let us know if you can use or if you need us to quote you on something else!
6H-SI 2" dia, Type/ Dopant : Semi-insulating / V
Orientation : <0001>+/-0.5 degree
Thickness : 330 ± 25 um
B Grade,MPDä30 cm-2 B Grade,RT:85 % =1E5 O·cm
Single face polished/Si face epi-ready with CMP,Surface Roughness : <0.5 nm
One Wafer: Sale

SiC - 6H (0001) 1" dia. x0.26 mm th., SSP
Sale Price: USD$395.00

SiC - 6H (0001) 8mm dia. x 0.3 mm th., SSP
Sale Price: USD$205.00

SiC - 6H (0001), 2" dia. x 0.33 mm thick, SSP
Sale Price:

SiC - 6H (0001), 2" dia. x0.26 mm th., DSP
Sale Price:

SiC - 6H (0001)/<11-20>^45 degree , 2" dia. x0.3 mm th., SSP
Sale Price:

SiC - 6H (0001), 5x5x0.3-0.33 mm, SSP
Sale Price: USD$55.95

SiC - 6H (0001), 5x5x0.33 mm, DSP
Sale Price: USD$39.95

SiC - 6H (0001), 1/4"x1/4"x0.26 mm , DSP
Sale Price: USD$109.00

SiC - 6H (0001), with 3.5 degree off , 5x5x0.26 mm, SSP
Sale Price: USD$79.95

SiC - 6H (0001), 10x10x0.26 mm , DSP
Sale Price: USD$199.00

SiC - 6H (0001), 10x10x0.33 mm , DSP
Sale Price: USD$179.95

SiC - 6H (0001), 10x10x0.26 mm , DSP
Sale Price: USD$229.00

SiC - 6H (0001), 10x10x0.3 mm , SSP
Sale Price: USD$179.95